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Product Overview：ZYGO ZMI – 4004
The ZYGO ZMI – 4004 is a high – performance 4 – axis VME64x measurement board, playing a crucial role in advanced displacement measuring interferometer systems. As part of ZYGO’s esteemed ZMI series, it is designed to meet the most demanding requirements in precision metrology applications.
This board is engineered to calculate displacement with remarkable accuracy by processing the light signals emitted from an interferometer, which is powered by a ZYGO laser source. With a resolution as fine as 0.15 nm, the ZYGO ZMI – 4004 enables next – generation lithography tools to achieve significantly enhanced overlay accuracy and higher throughputs. It provides a velocity of up to 2.55 m/sec, ensuring fast and responsive measurements in dynamic environments.
In the context of automation and precision control systems, the ZYGO ZMI – 4004 serves as a core component for achieving sub – nanometer – level positioning and motion control. Its 10 MHz data rate allows for rapid data acquisition and processing, facilitating real – time monitoring and adjustment. It can be modularly integrated into a VME chassis, and with the ability to support up to 64 measurement axes when multiple boards are combined, it offers great scalability for complex systems. This makes it an ideal choice for applications where high – precision, multi – axis control is essential, such as in semiconductor manufacturing, high – end optics fabrication, and ultra – precision machining.
Technical Specifications：ZYGO ZMI – 4004
| Parameter Name | Parameter Value |
|---|---|
| Product Model | ZMI – 4004 |
| Manufacturer | ZYGO |
| Product Type | VME64x Measurement Board |
| Resolution | 0.15 nm |
| Velocity | 2.55 m/sec |
| Number of Axes per Board | 4 |
| Data Rate | 10 MHz |
| Connector Types | ST fiber optic and HSSDC electrical connections |
| Compatibility with Lasers | Specific ZYGO laser models (e.g., those designed for the ZMI series) |
| Minimum Required Light Power | As per the requirements of the connected interferometer and laser system |
| Physical Dimensions | Dimensions suitable for VME64x chassis integration (exact values may vary depending on VME standard) |
| Weight | Weight optimized for VME chassis installation (exact value not widely publicized but designed to be lightweight for the form factor) |
| Operating Temperature Range | Designed to operate within standard industrial temperature ranges, typically around – 10°C to + 50°C (actual range may be specified in more detailed product documentation) |
| Humidity Tolerance | Can tolerate a relative humidity range of, for example, 20% – 80% non – condensing (subject to verification in official specs) |
ZMI – 4004
Key Features and Advantages：ZYGO ZMI – 4004
Exceptional Precision
With a resolution of 0.15 nm, the ZYGO ZMI – 4004 sets a high standard for precision in displacement measurement. This level of accuracy is critical in applications such as semiconductor lithography, where even the slightest deviation can lead to defective products. It allows for the most minute adjustments in machinery, ensuring the production of high – quality components with tight tolerances.
High – Speed Performance
The 2.55 m/sec velocity and 10 MHz data rate enable rapid and continuous measurement. In high – speed manufacturing processes, this board can keep up with the fast – paced motion of machinery, providing real – time data for immediate feedback and control. This not only improves the efficiency of the production process but also helps in maintaining consistent quality.
Multi – Axis Capability
Featuring 4 axes per board, the ZYGO ZMI – 4004 offers flexibility in multi – dimensional motion control. It can simultaneously monitor and control the movement of multiple components, which is essential in complex systems like multi – axis machining centers or robotic arms used in precision assembly. This multi – axis functionality reduces the need for multiple single – axis measurement devices, simplifying the system architecture and potentially reducing costs.
Reliable Connectivity
Equipped with ST fiber optic and HSSDC electrical connections, the board ensures stable and reliable data transfer. Fiber optic connections are immune to electromagnetic interference, which is a common issue in industrial environments. This reliability is crucial for maintaining the integrity of the measurement data, especially in settings where there are numerous electrical and electronic devices operating simultaneously.
Scalability
As part of a modular system, the ZYGO ZMI – 4004 can be easily added to a VME chassis, allowing for expansion up to 64 measurement axes. This scalability makes it suitable for both small – scale, specialized applications and large – scale industrial setups. Whether it’s a research laboratory with a need for a few – axis precision control or a large – scale manufacturing plant requiring extensive multi – axis monitoring and control, this board can be configured to meet the requirements.
ZMI – 4004
Application Areas：ZYGO ZMI – 4004
Semiconductor Manufacturing
In semiconductor lithography, the ZYGO ZMI – 4004 is used to control the movement of masks and wafers with sub – nanometer precision. It ensures accurate alignment during the patterning process, which is vital for producing high – density integrated circuits. The high – speed data rate and multi – axis control capabilities enable the rapid and precise movement required in modern lithography tools, contributing to higher yields and improved semiconductor device performance.
Optics Fabrication
For manufacturing high – precision optical components such as lenses and mirrors, the board plays a key role in controlling the polishing and grinding processes. The 0.15 nm resolution allows for extremely accurate shaping of optical surfaces, ensuring that the final products meet the strictest quality standards. The multi – axis control helps in handling complex geometries, enabling the production of custom – designed optical elements.
Ultra – Precision Machining
In ultra – precision machining centers, the ZYGO ZMI – 4004 is used to control the motion of cutting tools and workpieces. The high – speed and high – precision capabilities of the board enable the creation of intricate parts with tight tolerances. Whether it’s machining aerospace components or medical implants, the board ensures that the machining process is accurate and repeatable, resulting in high – quality finished products.
ZMI – 4004
Metrology and Calibration
In metrology laboratories, the board is used as a reference standard for calibrating other measurement devices. Its high – accuracy displacement measurement capabilities make it an ideal tool for verifying the performance of instruments such as coordinate measuring machines (CMMs) and laser trackers. The ability to operate at high speeds also allows for efficient calibration procedures, reducing the time required for instrument calibration.
Robotics in Precision Assembly
Robotic arms used in precision assembly, such as those in the electronics or micro – mechanical industries, rely on the ZYGO ZMI – 4004 for accurate positioning. The multi – axis control enables the robot to perform complex assembly tasks with high precision, ensuring that delicate components are assembled correctly. The board’s ability to provide real – time feedback on the position of the robotic arm helps in optimizing the assembly process and reducing errors.
Related Products：ZYGO ZMI – 4004
- ZMI – 2002: This is a 2 – axis measurement board from ZYGO. Compared to the ZMI – 4004, it has fewer axes, making it suitable for applications where a simpler, less complex multi – axis control is required. It may be used in smaller – scale setups or in systems where the cost – effectiveness of a 2 – axis solution is more important.
- ZMI – 501A: It comes in a convenient standalone enclosure and offers two measurement axes. It is more self – contained compared to the modular ZMI – 4004 and can be a good choice for applications where space is limited or a quick – to – install, independent measurement solution is needed.
- ZMI – 4100 series: Similar to the ZMI – 4004, the ZMI – 4100 series is designed for high – precision displacement measurement. However, it may have different features such as enhanced data processing capabilities or different connector options, which can make it more suitable for specific applications or integration with certain types of equipment.
- ZYGO laser sources compatible with ZMI series: These laser sources, like the 7705, 7702, 7714, and 7724 models, are essential for powering the interferometers that the ZMI – 4004 relies on. Different laser models may offer varying power outputs, wavelengths, or beam characteristics, allowing users to select the most appropriate one for their specific measurement requirements.
- ZYGO measurement optics and interferometers: These components work in tandem with the ZMI – 4004 to capture and analyze the light signals for displacement measurement. Different types of optics and interferometers are available, each designed for specific applications, such as measuring linear displacement, angular displacement, or for use in different environmental conditions.
ZMI – 4004
Installation and Maintenance：ZYGO ZMI – 4004
Installation Preparation
Before installing the ZYGO ZMI – 4004, ensure that the VME64x chassis is properly configured and powered off. Check the physical dimensions of the board to ensure a proper fit within the chassis. Verify that the ST fiber optic and HSSDC electrical connection ports on the board and the corresponding connectors on the associated equipment are clean and free from any debris. Prepare the necessary cables and connectors for connecting the board to the laser source, interferometer, and other components of the displacement measuring system. Also, make sure that the environment where the board will be installed meets the specified operating temperature and humidity requirements.
Maintenance Recommendations
Regularly inspect the board for any signs of physical damage, such as cracks or loose connections. Check the LED indicators on the board (if available) to ensure proper operation. Periodically clean the fiber optic and electrical connectors to maintain reliable data transfer. If the board is used in a dusty environment, consider using appropriate dust – protection measures. For optimal performance, it is advisable to follow ZYGO’s recommended calibration procedures for the entire displacement measuring system at regular intervals. This may involve using reference standards to verify the accuracy of the ZMI – 4004 and adjusting the system settings if necessary.
Product Warranty
Our company provides a comprehensive one – year quality warranty for the ZYGO ZMI – 4004 board. This warranty covers all hardware failures caused by non – human factors. In the unlikely event that the product experiences performance anomalies or functional failures during the warranty period, we will promptly provide a replacement service. Additionally, given our extensive global supply chain network, even for discontinued models or in cases of urgent requirements, we are well – equipped to quickly respond to customers’ needs for scarce spare parts. This ensures that industrial systems relying on the ZYGO ZMI – 4004 can continue to operate smoothly and reliably, minimizing downtime and maximizing productivity.
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