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Brooks Automation 001-4130-03 Product Specification
Product Overview:Brooks Automation 001-4130-03
The :Brooks Automation 001-4130-03 is a high-precision vacuum pressure controller designed for critical process control in semiconductor manufacturing, thin-film deposition, and vacuum-based industrial applications. As a key component of Brooks Automation’s Gauge Controllers portfolio, this model combines advanced sensor technology with real-time feedback control to maintain precise vacuum levels in chambers, reactors, and other enclosed systems. The Brooks Automation 001-4130-03 serves as a vital link in automation architectures, enabling seamless integration with supervisory control systems to optimize process repeatability and yield in high-tech manufacturing environments.
Engineered for reliability in harsh vacuum conditions, the Brooks Automation 001-4130-03 features a rugged stainless-steel construction and advanced digital signal processing. It supports a wide pressure measurement range (10⁻³ to 10² Torr) and offers both analog (0–10 VDC, 4–20 mA) and digital (RS-485) output options, ensuring compatibility with diverse control platforms. The module’s compact design (100 mm x 80 mm x 50 mm) and DIN rail mounting facilitate easy integration into existing control panels, while its wide operating temperature range (-20°C to +70°C) makes it suitable for both cleanroom and industrial environments.
In semiconductor fabrication lines, the Brooks Automation 001-4130-03 acts as a frontline device for monitoring and regulating vacuum pressure during etching, deposition, and lithography processes. Its fast response time (≤50 ms) and high accuracy (±1% of full scale) are critical for preventing process variations that could compromise chip quality. By providing real-time pressure data and automated control signals, the module helps reduce downtime, minimize material waste, and ensure compliance with strict industry standards for process consistency.
Technical Specifications:Brooks Automation 001-4130-03
| Parameter Name | Parameter Value |
|---|---|
| Product Model | Brooks Automation 001-4130-03 |
| Manufacturer | Brooks Automation |
| Product Type | Vacuum Pressure Controller |
| Pressure Range | 10⁻³ to 10² Torr |
| Accuracy | ±1% of full scale |
| Output Signals | Analog: 0–10 VDC, 4–20 mA; Digital: RS-485 (Modbus RTU) |
| Power Supply | 24 VDC ±10% |
| Physical Dimensions | 100 mm (W) × 80 mm (H) × 50 mm (D) |
| Weight | 0.5 kg |
| Operating Temperature | -20°C to +70°C |
| Humidity | 5% to 95% non-condensing |
| Installation | DIN rail mounting or panel mount |
| Certifications | CE, SEMI S2/S8 (for semiconductor use) |
Brooks Automation 001-4130-03
Main Features and Advantages:Brooks Automation 001-4130-03
High Precision and Fast Response: The Brooks Automation 001-4130-03 delivers exceptional measurement accuracy (±1%) and a rapid response time of ≤50 ms, ensuring tight control over vacuum pressure in dynamic processes. This is critical in semiconductor etching, where slight pressure fluctuations can affect feature dimensions and etch uniformity.
Dual Communication Interfaces: With both analog and digital output options, the module offers flexibility in integrating with legacy and modern control systems. The RS-485 interface supports Modbus RTU protocol, enabling seamless communication with PLCs, DCS systems, or human-machine interfaces (HMIs) for centralized monitoring and control.
Rugged Industrial Design: Constructed with a corrosion-resistant stainless-steel housing, the Brooks Automation 001-4130-03 withstands aggressive process gases and particle-laden environments typical of semiconductor fabs. Its robust design minimizes maintenance needs and ensures long-term reliability in 24/7 operational settings.
User-Configurable Settings: The module features the front-panel interface or remote software configuration for adjusting setpoints, alarm thresholds, and output scaling. This flexibility allows engineers to tailor the controller to specific process requirements, such as switching between pressure units (Torr, mBar, Pa) or enabling hysteresis for stable control.
Compliance with Industry Standards: Certified to SEMI S2/S8 safety guidelines for semiconductor manufacturing, the Brooks Automation 001-4130-03 meets strict environmental and safety requirements. Its compatibility with ISO 14644-1 cleanroom standards further ensures suitability for high-purity applications.
Brooks Automation 001-4130-03
Application Areas:Brooks Automation 001-4130-03
The Brooks Automation 001-4130-03 is widely deployed in industries requiring precise vacuum control and reliable performance:
-
Semiconductor Manufacturing:
- Etching and Deposition: Regulates vacuum pressure in plasma-enhanced chemical vapor deposition (PECVD) and reactive ion etching (RIE) chambers to ensure uniform film growth and feature precision.
- Ion Implantation: Maintains stable vacuum levels during dopant ion implantation, critical for achieving consistent semiconductor device characteristics.
-
Thin-Film Coatings:
- Vacuum Deposition: Controls pressure in physical vapor deposition (PVD) systems for applying anti-reflective coatings on optics or barrier layers on flexible electronics.
- Roll-to-Roll Coating: Integrates with continuous coating lines to maintain optimal vacuum conditions for high-throughput production of solar panels or battery electrodes.
-
Research and Development:
- Vacuum Furnaces: Monitors pressure in heat-treatment furnaces for materials science experiments, ensuring precise control over thermal processing parameters.
- Mass Spectrometry: Provides stable vacuum conditions for analytical instruments, enhancing the accuracy of gas composition analysis.
-
Industrial Vacuum Systems:
- Packaging Equipment: Controls vacuum levels in food packaging machines to extend product shelf life through modified atmosphere packaging.
- Vacuum Casting: Optimizes pressure in casting molds to reduce porosity and improve the mechanical properties of metal components.
Brooks Automation 001-4130-03
Related Products:Brooks Automation 001-4130-03
- Brooks Automation 001-4130-02: A lower-range variant (10⁻⁵ to 10 Torr) designed for ultra-high vacuum (UHV) applications, such as electron microscopy or sputter coating.
- Brooks Automation 001-4130-04: A high-pressure model (10⁰ to 10³ Torr) suitable for rough vacuum applications, such as pump-down systems in industrial chambers.
- Brooks Automation 002-1234-01: A compatible pressure gauge module with a built-in display, often used alongside the 001-4130-03 for local pressure monitoring.
- Brooks Automation 003-5678-01: A vacuum valve controller that integrates with the 001-4130-03 to create a closed-loop pressure control system, enabling automatic adjustment of valve positions.
- Brooks Automation 004-9012-01: An Ethernet gateway module that converts the 001-4130-03’s RS-485 signal to Ethernet/IP, facilitating integration with IIoT platforms for remote diagnostics.
Installation and Maintenance:Brooks Automation 001-4130-03
Pre-installation Preparation:
Before installing the Brooks Automation 001-4130-03, ensure the following:
Before installing the Brooks Automation 001-4130-03, ensure the following:
- Verify the power supply voltage (24 VDC) and ground the module properly to prevent electromagnetic interference (EMI).
- Use appropriate fittings to connect the pressure sensor port to the vacuum chamber, ensuring airtight seals to avoid leaks.
- Configure the module’s communication parameters (baud rate, address) using Brooks Automation’s proprietary software or a Modbus master device to match the control system’s settings.
Maintenance Recommendations:
- Routine Calibration: Perform annual calibration using a certified pressure source to maintain measurement accuracy. Brooks Automation offers factory calibration services for traceable results.
- Leak Detection: Regularly inspect pressure connections and seals for signs of wear or corrosion, particularly in environments with aggressive gases. Replace faulty components immediately to prevent measurement errors.
- Software Updates: Periodically check for firmware updates on Brooks Automation’s website to access new features or compatibility improvements with newer control systems.
- Environmental Cleaning: Wipe the module’s exterior with a static-free cloth to remove dust or debris, ensuring proper ventilation and heat dissipation in enclosed control panels.
Brooks Automation 001-4130-03
Product Warranty:Brooks Automation 001-4130-03
Our company provides a one-year quality warranty for the Brooks Automation 001-4130-03, covering all non-human-induced defects in materials and workmanship. During the warranty period, any module experiencing signal drift, power supply failure, or mechanical issues will be replaced or repaired at no cost. For discontinued or hard-to-find models like the 001-4130-03, our global network of suppliers and extensive inventory allow us to fulfill urgent orders quickly, minimizing downtime for critical processes. We also offer post-warranty support, including calibration services and technical consultations, to ensure the long-term performance of your automation systems.
Contact Information:
Whatsapp: +86 18859254943
E-mail: sales@ygplc.com
Whatsapp: +86 18859254943
E-mail: sales@ygplc.com
Note: This product description is based on technical data derived from Brooks Automation’s specifications and industry applications. For detailed operational instructions, refer to the Brooks Automation 001-4130-03 user manual or contact our technical support team for personalized assistance.
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