Description

AMAT 0010-44968 – Radiance Emissometer

Product Overview

The 0010-44968 is an Applied Materials emissometer used in semiconductor thermal-processing equipment. Available parts references identify it specifically as an ISSG Emissometer for AMAT RTP equipment, while other industry listings associate the same part number with Radiance RTP systems. Its primary function is to measure wafer emissivity, an important parameter for accurate non-contact temperature measurement during rapid thermal processing. Emissivity data helps the control system compensate for changes in wafer surface properties and improve temperature measurement consistency. This type of optical measurement hardware is particularly relevant to RTP applications where precise thermal control affects process repeatability and wafer quality. For maintenance procurement, the exact equipment platform and sensor configuration should be checked before substitution because emissometer assemblies are application-specific rather than interchangeable general-purpose instruments.

Technical Specifications — 0010-44968

Current industry parts references list the part as an [ISSG] Emissometer, while another listing identifies it as an AMAT RTP Radiance dual-channel OLT/emissometer assembly. These descriptions support its use in optical thermal measurement applications, but exact electrical and mechanical specifications should be confirmed against the equipment revision.

AMAT 0010-44968

Key Features and Benefits — 0010-44968

• Designed for wafer emissivity measurement in RTP equipment.
• Supports non-contact optical thermal measurement.
• Used in Radiance and ISSG-related equipment configurations.
• Helps compensate temperature measurement for wafer surface emissivity.
• Suitable for maintenance of legacy Applied Materials thermal-processing systems.
• Provides a dedicated measurement component rather than a generic temperature transmitter.

The main engineering consideration is calibration and equipment compatibility. A physically similar optical sensor may not provide the same measurement characteristics or interface required by the original tool.

Related Models

0010-44213: Applied Materials ISSG pyrometer used for optical temperature measurement in RTP equipment.

0010-23715: Radiance+ 2 mm pyrometer probe for 300 mm RTP applications.

0010-23716: Radiance+ pyrometer probe used with multiple Radiance+ configurations.

0190-32002: Vulcan emissometer used in another Applied Materials thermal-processing configuration.

Installation and Maintenance — 0010-44968

Before installation, verify the applicable RTP platform, optical path, mounting arrangement, cabling, controller interface, and calibration requirements. Keep the optical sensing path clean and protected from contamination, since particles or deposits can affect measurement accuracy.

During maintenance, inspect connectors, cables, mounting hardware, optical surfaces, and evidence of thermal exposure. After installation, perform the equipment-specific calibration or verification procedure before returning the thermal-processing system to production.

Personally, I would verify the exact Radiance or ISSG configuration before purchasing a replacement. Optical measurement components can appear interchangeable while having different calibration or interface requirements.

Product Warranty — 0010-44968

Warranty terms should be confirmed with the supplier according to the actual supplied condition, such as new, unused surplus, refurbished, or tested-used. For critical semiconductor equipment spares, procurement records should include the complete part number, equipment compatibility, inspection status, and applicable warranty period.

When sourcing the AMAT 0010-44968, confirm the equipment platform and emissivity-measurement configuration before purchase to ensure the replacement matches the installed thermal-control system.