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AMAT 0010-23716 – High-Precision Pyrometer (High-Temperature Measurement Instrument)
Product Overview
The AMAT 0010-23716 is a high-precision pyrometer (high-temperature measurement instrument) developed by Applied Materials (AMAT), specifically designed for accurate temperature monitoring in semiconductor manufacturing processes. It addresses the problem of imprecise high-temperature measurement in harsh process environments such as thermal oxidation, diffusion, and deposition, ensuring process stability and product quality. Widely used in semiconductor chip manufacturing and high-temperature industrial fields, it provides real-time, reliable temperature data to support precise process control and quality assurance.
Technical Specifications — AMAT 0010-23716
| Parameter | Value |
|---|---|
| Product Model | AMAT 0010-23716 |
| Manufacturer | AMAT (Applied Materials) |
| Product Type | High-Precision Pyrometer (High-Temperature Measurement Instrument) |
| Power | 115V AC / 230V AC (Dual Voltage) |
| Communication / Protocol | Compatible with AMAT PMAX Series Control Protocol |
| Operating Temperature | 500°C – 1200°C (Measurement Range) |
| Mounting | Modular Mounting (Fits Semiconductor Process Chambers) |
| Dimensions (HxWxD) | 150mm x 80mm x 65mm (Typical) |
| Weight | 0.5kg (Typical) |
| Typical Interfaces | High-Speed Data Transmission Interface (for PMAX Systems) |
| Compliance | Semiconductor Industry Quality Standards, CE Certified |
AMAT 0010-23716
Key Features and Benefits — AMAT 0010-23716
- High measurement accuracy (±1% typical) to meet the strict temperature control requirements of semiconductor manufacturing processes.
- Fast response speed, enabling real-time temperature monitoring and timely feedback to the control system for process adjustment.
- High-temperature resistant design, suitable for harsh working environments in semiconductor process chambers.
- Modular structure, easy to integrate with AMAT PMAX series heat treatment equipment and other semiconductor systems.
- Reliable performance with high-quality components, ensuring long-term stable operation in continuous production scenarios.
Related Models
- AMAT 0010-23717: High-precision pyrometer with extended measurement range (400°C – 1300°C), ideal for extreme-temperature semiconductor processes.
- AMAT 0010-23715: Cost-effective pyrometer for general high-temperature measurement in industrial manufacturing.
- AMAT 0010-23718: Smart pyrometer with built-in data logging function, convenient for process traceability and analysis.
- AMAT 0010-23719: Waterproof pyrometer, suitable for high-humidity high-temperature measurement scenarios.
Installation and Maintenance — AMAT 0010-23716
- Mount in a position aligned with the semiconductor process chamber’s temperature measurement point, ensuring no obstruction to heat radiation.
- Before use, calibrate according to AMAT’s standard calibration procedures to ensure measurement accuracy.
- Routine maintenance includes regular cleaning of the probe surface to remove dust and debris that may affect measurement results.
- Avoid direct contact with high-temperature surfaces to prevent damage to the instrument’s internal components.
- Store in a dry, dust-free environment when not in use, and avoid exposure to extreme temperature changes.
AMAT 0010-23716 | AMAT 0010-23715 | AMAT 0100-71267 | AMAT 0200-00672
