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Product Overview: Huttinger TPFH-1489302-06
The Huttinger TPFH-1489302-06 is a high – power RF generator module designed for precision plasma and laser processing systems. As part of Huttinger’s TPF series (now under TRUMPF Group), it delivers stable RF energy for critical industrial applications, including semiconductor manufacturing, thin – film coating, and material surface treatment. Its ruggedized design ensures reliable operation in environments with electromagnetic interference (EMI) and thermal stress, featuring advanced fault – detection circuits for continuous process control.
This module is characterized by its precision power regulation and enhanced serviceability. Dynamic impedance matching maintains ±0.8% power stability under load fluctuations, essential for uniform plasma density in etching and deposition processes. The modular design enables field – replaceable IGBT stacks and capacitor banks, while integrated diagnostic LEDs accelerate fault isolation. The Huttinger TPFH-1489302-06 is also compatible with TRUMPF TPS 10000 series interfaces through the H – bus protocol, supporting seamless integration into automated production lines.
Technical Specifications
| Parameter | Value |
|---|---|
| Product Model | TPFH-1489302-06 |
| Manufacturer | Huttinger (TRUMPF Group) |
| Product Type | RF Power Generator Module |
| Rated Power | 15 kW (typical) |
| Frequency Range | 13.56 MHz ± 0.05% |
| Cooling Method | Forced – air/water hybrid |
| Protection | Overvoltage/overcurrent lockout |
| Communication | Analog control + RS – 485 |
Related Products
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TPFH – 1489302 – 05: A 10kW predecessor model.
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TRUMPF Hüttinger 361249: A 20kW successor.
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Huttinger 1306/003 RF Board: A control component.
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TPFH – 1489308 – 06: A high – frequency variant (27.12 MHz).
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HPP 8032: A compact industrial RF generator.
Main Features and Advantages
The Huttinger TPFH-1489302-06 stands out due to its advanced features and numerous advantages. One key strength is its precision power regulation. Dynamic impedance matching maintains ±0.8% power stability under load fluctuations, essential for uniform plasma density in etching and deposition processes. Harmonic suppression circuits reduce EMI interference by 45dB.
Another notable feature is its enhanced serviceability. The modular design enables field – replaceable IGBT stacks and capacitor banks, while integrated diagnostic LEDs accelerate fault isolation. Hot – swappable cooling fans extend mean time between failures (MTBF) beyond 60,000 hours.
The Huttinger TPFH-1489302-06 also excels in system integration. It is compatible with TRUMPF TPS 10000 series interfaces through the H – bus protocol, supporting seamless integration into automated production lines. Conformal – coated PCBs resist chemical vapors in cleanroom environments.
Installation and Maintenance
Pre – installation preparations: Before installing the Huttinger TPFH-1489302-06, ensure that the installation site meets the specified environmental and electrical requirements. This includes verifying the availability of the required power supply and communication interfaces. Proper planning and preparation will help ensure a smooth installation process and prevent potential issues.
Maintenance suggestions: Regular maintenance is crucial to ensure the long – term performance and reliability of the Huttinger TPFH-1489302-06. This includes periodic inspection of the module for signs of wear or damage, cleaning of the surface to remove dust and debris, and verification of the connections and communication links. Keeping the firmware up – to – date will also benefit from the latest improvements and security enhancements. Following these maintenance guidelines will help extend the lifespan of the module and maintain its optimal performance.
Application Fields
The Huttinger TPFH-1489302-06 is widely used across various industrial sectors. In the semiconductor manufacturing industry, it provides stable RF energy for processes such as photolithography and plasma etching. In the thin – film coating industry, it ensures uniform coating thickness and high – quality surface finishes. In material surface treatment applications, it supports processes like plasma cleaning and surface activation. Its robust design and advanced features make it suitable for use in harsh industrial environments, ensuring reliable and efficient operation.
Product Guarantee
Our company provides a one – year quality warranty service for the Huttinger TPFH-1489302-06, covering hardware malfunctions not caused by human factors. During the warranty period, if the product shows abnormal performance or functional failure, we will provide replacement services. In addition, for discontinued models or urgent demands, relying on our global supply chain network, we can quickly respond to customers’ procurement needs for scarce spare parts, and provide reliable services to support the continuous and stable operation of industrial systems.